发明名称 POLISHING APPARATUS
摘要 PURPOSE:To remove abrasive attached to an index table on the discharging side for preventing scratch of a work by providing a cleaning means with the index table. CONSTITUTION:After all of polished works 12 stored in an index table 15 on the discharging side are stored in a cassette of a work storage on the discharging side, an arm 43 is moved by a driving source from the waiting position A to the cleaning position B of the index table. Then the arm 43 is lowered to bring the ends of hairs 41b of a brush 41 into contact with a work support 15a of the index table 15, and while pure water is being injected from an injection port 51 the brush 41 is rotated for a specified period of time. Abrasive attached to the work support 15a is removed by this operation. Then the arm 43 is lifted, the index table 15 is intermittently rotated to place the next work support 15a below the brush 41, and the arm 43 is lowered to perform cleaning. These operations are sequentially carried out and after all of the work supports 15a are cleaned, the arm 43 is lifted to return the arm 43 to the waiting position A.
申请公布号 JPH02301137(A) 申请公布日期 1990.12.13
申请号 JP19890121088 申请日期 1989.05.15
申请人 TOSHIBA MACH CO LTD 发明人 KAWAKAMI HIDEO;YONEYA OSAMU
分类号 H01L21/304;B24B37/00 主分类号 H01L21/304
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