TURBO-MOLECULAR PUMP,申请号JP19890120280-传众专利搜索

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发明名称	TURBO-MOLECULAR PUMP
摘要
申请公布号	JPH02301698(A)	申请公布日期	1990.12.13
申请号	JP19890120280	申请日期	1989.05.16
申请人	ULVAC CORP	发明人	YAMAKAWA HIROYUKI
分类号	F04D19/04	主分类号	F04D19/04
代理机构		代理人
主权项
地址

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