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发明名称
FORMATION OF FILM
摘要
申请公布号
JPH02301565(A)
申请公布日期
1990.12.13
申请号
JP19890122454
申请日期
1989.05.16
申请人
FUJITSU LTD
发明人
SUGITA YOSHIHIRO
分类号
C30B23/08;C23C16/48;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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