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发明名称
ROBOTIC ACCESSIBLE WAFER SHIPPER ASSEMBLY
摘要
申请公布号
EP0360857(A4)
申请公布日期
1990.12.12
申请号
EP19890903655
申请日期
1989.03.03
申请人
FLUOROWARE, INC.
发明人
KOS, ROBERT, D.
分类号
B65D85/86;H01L21/673;(IPC1-7):B65D73/02;B65D85/42;B65D85/48
主分类号
B65D85/86
代理机构
代理人
主权项
地址
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