| 摘要 |
<p>A semiconductor-laser length measuring apparatus includes first and second semiconductor lasers (11a, 11b) which oscillate in wavelength regions different from each other, frequency modulation means (104a, 104b) for modulating an oscillation frequency of the first semiconductor laser, light beam dividing means (2, 31) for dividing first and second laser light beams output from the first and second semiconductor lasers (11a, 11b), respectively, into third and fourth, and fifth and sixth light beams, respectively, phase difference detection means for projecting the third and fifth laser light beams onto and making them reflect from an object (10) to be measured, and for detecting a phase difference between the third and fourth laser light beams, and a phase difference between the fifth and sixth laser light beams, and means for obtaining an optical path difference between the divided laser beams according to the result of the detection. When incremental measurement is performed, there is provided means for incrementally obtaining an optical path difference between divided laser light beams, for example, according to a difference between a beat signal produced from interference between the third and fourth laser light beams, or from interference between the fifth and sixth laser light beams, and an oscillation frequency for driving the first and second AO modulators (104a, 104b). The apparatus switches to incremental measurement after measuring an absolute optical path difference.</p> |
