发明名称 Process and apparatus for plasma outside deposition of silica free from hydroxyl ions.
摘要 <p>Process and device for plasma external deposition on a rod of silica substantially free from hydroxyl ions, optionally doped with a view to modifying its refractive index, by reaction of a silicon compound and optionally of doping compounds with oxygen in the presence of a gas plasma heated to very high temperature by induction with the aid of a high-frequency generator. &lt;??&gt;The rod on which the deposition of silica is performed is maintained in a leakproof vessel isolated from the surrounding atmosphere and fed (20) with atmospheric air which is subjected successively to a filtration (31), a compression (32) and a refrigeration (33), a purging of the condensed water (35) and then a final drying by absorption (36,38). &lt;IMAGE&gt; </p>
申请公布号 EP0401742(A1) 申请公布日期 1990.12.12
申请号 EP19900110603 申请日期 1990.06.05
申请人 COMPAGNIE GENERALE D'ELECTRICITE SOCIETE ANONYME DITE: 发明人 LE SERGENT, CHRISTIAN
分类号 C03B37/018;C03B20/00;C03B37/014;C03C17/245 主分类号 C03B37/018
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