发明名称 MEANS AND METHODS FOR HEATING SEMICONDUCTOR RIBBONS AND WAFERS WITH MICROWAVES
摘要 Means and method including a novel waveguide sample holder for applying traveling microwaves to heat thin low-resistivity semiconductor ribbons and wafers without a susceptor. Traveling microwaves are applied to the semiconductor materials, both with and without a traveling wave resonator. Efficient coupling is obtained by unique placement of the samples in the waveguide.
申请公布号 CA1277717(C) 申请公布日期 1990.12.11
申请号 CA19870542600 申请日期 1987.07.21
申请人 ARIZONA BOARD OF REGENTS 发明人 SIRKIS, MURRAY D.
分类号 H01L21/324;H01L21/22;H05B6/68;H05B6/70;H05B6/80 主分类号 H01L21/324
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