| 摘要 |
PURPOSE:To enable inspection of an internal state of an object to be measured, at a high speed and with a high S/N ratio, by a method wherein the object to be measured which is put between an X-ray source and a detecting means is moved at a prescribed speed, X-rays are applied thereto from different directions and a detected image signal is added. CONSTITUTION:With X-rays applied from an X-ray source 35 to a ceramic pattern 52, a moving table 53 is made to move at a prescribed speed and the penetration of X-rays is detected by an X-ray TV camera 36. A detection signal is stored in a frame memory 54 and delayed by a delay circuit 55 so that it be an image output obtained by detection of the same spot from different directions. An image signal is corrected by a distortion correcting circuit 56 and then added up in a discrimination circuit 57 and thereby white noise is removed. Based on the signal thus processed, the penetration of X-rays is discriminated and the presence or absence of a defect of the pattern 52 is detected. According to this method, the internal state of an object can be inspected at a high speed and with high S/N in a non-contact and non-destructive manner. |
