| 摘要 |
PURPOSE: To manufacture a very small laser structure having a mirror facet constitative structure body, without substantially contaminating the structure by nearly at the some time forming a laser diode and the mirror facet in a closed space. CONSTITUTION: A semi-insulating gallium arsenide substrate 2, on which a gallium arsenide layer 4 doped with an n-type impurity, a gallium aluminum arsenide layer 6 doped with an n-type impurity, and an undoped gallium arsenide layer 8 are successively formed, is prepared and insulating sidewalls 14 are formed on vertical walls 44 formed by patterning and etching the layer 8. Then the internal walls 45 of the side walls 14 are exposed by removing mandels 9. After the side walls 14 have been exposed, a laser diode is formed in the area 15 between the sidewalls 14 by removing the gallium aluminum arsenide 6 by using the side walls 14 as a mask, and a mirror facet 13 is formed of the internal walls 45 of the sidewalls 14. As a result of this, the compact structure of a laser having a mirror facet 13 can be obtained without being contaminated.
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