| 摘要 |
PURPOSE: To realize an accurate, high-speed, low-priced and compact mirror tilt mechanism by providing the device with a central supporting unit having rigidity, a flexible rubber damper member and plural electromagnetic force generating units. CONSTITUTION: This device is constituted so that the mirror of an interferometer is dynamically matched to obtain desired orthogonality. The mirror supporting body 24 supporting the mirror 26 is fixed and coupled with a base unit 12 through a support 20 arranged in the center and further a collar 22 consisting of viscoelasic impact absorbing material is formed as a damping means to surround a mating standoff 16 including the support 20. Four electromagnetic units 32 to 38 are arranged at four corners of a square centering the standoff 16 between a mirror assembly 14 and the base 12. When a current is applied to a coil 40, the inclination of the mirror supporting body 24 to the base 12 is adjusted by the magnetic field of a permanent magnet 42 and a pole piece 44. |
