| 摘要 |
PURPOSE:To improve bonding efficiency while suppressing bonding damage by changing magnitude of bonding weight with the elapse of time. CONSTITUTION:A capillary 11 sinks apparently at only the amount of S1 when bonding weight W1 is given. In such a case, a pellet 2 is heated by a heat block 6 and weight W1 is added and then, a ball 5a transforms proportionately. Energy from an ultrasonic generator 13 is given to the ball 5a through an arm 10 as well as the capillary 11 to make new phases 32 and 33 develop. Such an energy is tuned to weight W which presses the ball 5a to the pad 2 and its energy is changed and adjusted so that it becomes large in the first half of works and becomes low in the later half of the works. When weight W1 and oscillation f1 act merely upon setting time, the above weight and oscillation are changed into weight W2 and oscillation f2. |
