| 摘要 |
PURPOSE:To acquire a good contact having a small contact resistance and to realize a low cost by using a specific metallic powder of approximately spherical shape as a filler of conductive paste which is used for a second electrode provided to the counter side of a light transmitting insulating substrate. CONSTITUTION:In a manufacture process of a thin film solar battery having a second electrode which is formed by applying and firing a light transmitting first electrode to the substrate side of a semiconductor thin film on a light transmitting insulating substrate, and conductive paste which consists of a metallic powder as a filler and a resin as a combining material to the counter side of the substrate, a metallic powder of an approximately spherical shape is contained as a filler of conductive paste. When an average grain radius is rmcm, an average number per cm<2> is n, a short-circuit current density of a thin film solar battery to be manufactured is JA/cm<2> and a sheet resistance of an amorphous semiconductor layer which is in contact with the second electrode is R3OMEGA/square, a value of an equation is made smaller than 0.1. Spherical metallic powders 51, 52, 53... are arranged on the amorphous semiconductor layer 30 at approximately equal intervals in contact therewith. |
