| 摘要 |
The accelerometer comprises two side electrode structures (15) incorporating fixed side electrodes (4) and, arranged between the fixed side electrodes, a centre electrode structure (16) which incorporates at least one centre electrode (17). The centre electrode structure (16) comprises a planar body element (3) providing a wall which, with the side electrode structures, defines a cavity. In the cavity a movable electrode portion (1) of centre electrode (17) is supported in cantilever by a stem portion (2) projecting from the wall. The device is symmetrical about plane S. The centre electrode structure is processed by etching a groove penetrating the body element (3) in a U-shape and delineating the cantilever beam-like centre electrode (17). Portion (1) of the centre electrode (17) is formed thinner than the wall section of the body element (3) so that electrode gaps (7) are formed between the side electrodes (4) and the centre electrode (17). The stem section (2) of the centre electrode structure (16), integral with the body element (3), is essentially thinner than the portion (1) in order to obtain a flexible centre electrode (17). The transducer construction in accordance with the invention is easily manufactured in mass production. <IMAGE> |
