| 摘要 |
PURPOSE:To transfer a wafer in high efficiency by transferring each predetermined numbers of dummy wafers for a product and monitoring wafers to be inserted between the dummy wafers. CONSTITUTION:Cassettes each containing 25 wafers for a product, dummy wafers and monitoring wafers are contained in racks 24 of a cassette stocker 19. The wafers of the cassettes are discharged via the racks 24 moving by a horizontal movement motor 25, and a handling unit 22 moving up or down via a transfer elevator 23, and transferred to the port of a vertical CVD diffuser via a loading/unloading elevator 17. The number of the wafers to be transferred is 5 wafers for the product and monitoring wafers, and one monitoring wafer between both the wafer groups, the logic number processing of the wafers of the cassette is eliminated, and high efficiency transfer can be performed by the five each transfers.
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