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发明名称
PRODUCTION OF THIN FILM
摘要
申请公布号
JPH02298294(A)
申请公布日期
1990.12.10
申请号
JP19890117481
申请日期
1989.05.12
申请人
IDEMITSU KOSAN CO LTD
发明人
YOKOYAMA SEIICHIRO
分类号
G02B5/22;C25D9/02;C25D13/04
主分类号
G02B5/22
代理机构
代理人
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地址
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