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发明名称
摘要
申请公布号
JPH0258766(B2)
申请公布日期
1990.12.10
申请号
JP19810104453
申请日期
1981.07.06
申请人
HITACHI LTD
发明人
KOMORYA SUSUMU;MAEJIMA HIROSHI;IRIKITA NOBUYUKI;NAGATOMO HIROTO;OOSAKAYA TAKAYOSHI
分类号
H01L21/30;G03F7/20;H01L21/027
主分类号
H01L21/30
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代理人
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