发明名称 Process for producing group III-V semiconductor devices on a silicon substrate
摘要 Process for producing group III-V integrated semiconductor devices, including the production, on a silicon Si substrate, of a first so-called nucleation layer of gallium arsenide GaAs, followed by a second layer of gallium arsenide GaAs, then a constrained structure of III-V material, and including thermal cycles, characterised in that the constrained structure consists of two epitaxial layers of the same III-V compound and which alternate and is produced in the course of a so-called first series of thermal cycles in which each cycle comprises two phases of growth at respectively two distinct and steady temperatures during the growth operation. Application: microwave and optoelectronic circuits. <IMAGE>
申请公布号 FR2647957(A1) 申请公布日期 1990.12.07
申请号 FR19890007098 申请日期 1989.05.30
申请人 LABO ELECTRONIQUE PHYSIQUE APPLI 发明人 JEROME BEAUCOUR
分类号 H01L21/20 主分类号 H01L21/20
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