发明名称
摘要 An EPROM as a nonvolatile semiconductor memory device includes a semiconductor substrate 1, a gate oxide layer 3 formed on the surface of the semiconductor substrate 1, a plurality of floating gates 4a and 4b formed on the gate oxide layer 3 so as to overlap one another at the portions 4ab thereof with a gate oxide layer 14 sandwiched between the overlapping portions 4ab, and control gate strips 5 formed on a gate oxide layer 6 which overlies the floating gates 4a and 4b.
申请公布号 DE3832641(C2) 申请公布日期 1990.12.06
申请号 DE19883832641 申请日期 1988.09.26
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP 发明人 KOHDA, KENJI;TOYAMA, TSUYOSHI;ANDOH, NOBUAKI;NOGUCHI, KENJI;KOBAYASHI, SHINICHI, ITAMI, HYOGO, JP
分类号 H01L21/8246;H01L21/8247;H01L27/112;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8246
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