| 摘要 |
PURPOSE:To widen a processable region by disposing aspherical lenses which make uniform the sectional intensity of the laser beam emitted from a laser transmitter and plural rows of condenser lenses on the plane in the optical path of the laser beam made uniform by the above-mentioned lenses. CONSTITUTION:The sectional intensity distribution of the laser beam 2a having a gauss distribution is made uniform by using the aspherical lenses 3, 4. The uniformized laser beam 2b is projected to a condensing optical device 8 constituted of several pieces of the condenser lenses 11. Since the intensity of the incident laser beams on the respective condenser lenses is uniform, the laser energy density at the respective processing points condensed by the condenser lenses is equaled as well. The uniform processing of even the central part and peripheral part of the processing region is possible in this way and further, the effective utilization of the greater part of the energy of the laser beam for processing is possible and, therefore, the processable region is widened. |
