| 摘要 |
PURPOSE:To allow hole processing with high accuracy by constituting the above device of a pressure contactor which brings a work into pressurized contact, a position detecting section which detects the position thereof and measures a displacement quantity and a lens position adjusting section which receives the measured displacement quantity as an input signal and adjusts the position of a lens. CONSTITUTION:The pressure contactor 19 is advanced to the work 18 and is brought into pressurized contact with the processing surface of the work. Then, the position detecting section 25 detects the position of the pressure contactor and measures the displacement quantity thereof. The lens position adjusting section 28 receives the above-mentioned displacement quantity as the input signal and adjusts the position of the lens 16. The adequate adjustment of the focus of the lens with respect to the work 18 is thereby executed. If there is a bend on the processing surface of the work 18 at this time, the pressure contactor comes into contact with pressurized contact with the processing surface having this bend, by which the bend is corrected and the perpendicular irradiation of laser light to the processing surface is obtd. The processing is thus executed with the high accuracy. |
