| 摘要 |
<p>PURPOSE:To effectively stop at a predetermined position without using a protrusion such as a positioning pin, etc., by forming a shallow step of the degree which does not disturb conveyance to a conveying stage of an air bearing. CONSTITUTION:A wafer 8 introduced to a cassette of a loader 6 side is fed onto a conveying stage 11 via a conveyor belt 10. A conveying mechanism of an air bearing 12 is attached to the stage 11, and the wafer 8 is thereby moved on the stage 11. The movement of the wafer is detected by a transmission type sensor disposed at the center of the stage 11. When it is moved to the position of a shallow stage 13 formed at a predetermined position, the wafer 8 is secured to a vacuum chuck 14, and the air of the bearing 12 is stopped simultaneously.</p> |
