VAPOR CRYSTAL GROWTH DEVICE,申请号JP19890117089-传众专利搜索

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发明名称	VAPOR CRYSTAL GROWTH DEVICE
摘要
申请公布号	JPH02296319(A)	申请公布日期	1990.12.06
申请号	JP19890117089	申请日期	1989.05.10
申请人	MITSUBISHI ELECTRIC CORP	发明人	OTA YOICHIRO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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