发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREFOR
摘要 PURPOSE:To facilitate the connection to a stand-by circuit and to prevent malfunction by a method wherein a redundant circuit is connected to a switching element permitting destruction by external operation and continuity is controlled by the switching element. CONSTITUTION:SiO2 22, SiO2 50 are stacked on an Si substrate 21 to provide an opening at a layer 50 and a P layer 23 and an N layer 24 are selectively made by filling poly Si. The layer 50 is covered with SiO2 51 and Al wiring 27 is formed by providing openings at the end sections of the layers 23, 24 and the Al wiring 27 is connected to a redundant circuit in the same substrate. Next, the Al wiring 27 is covered with PSG528 to provide an opening on a switching element 26. A p-n junction 25 is maintained at reverse bias. When the redundant circuit is operated by generating a fault in a circuit, the junction 25 is destructed by aiming ion beams at the element 26 and the element 26 is changed to ohmic low resistance 26. In this composition, a grounded stand-by circuit is activated by simple operation or a redundant circuit permitting nonactivity by grounding a faulty circuit can be formed.
申请公布号 JPS57198644(A) 申请公布日期 1982.12.06
申请号 JP19810082501 申请日期 1981.06.01
申请人 TOKYO SHIBAURA DENKI KK 发明人 NATORI KENJI
分类号 H01L21/822;H01L21/82;H01L27/02;H01L27/04;H01L27/10;H01L29/78 主分类号 H01L21/822
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