发明名称 |
Semiconductor sensor with vibrating element. |
摘要 |
<p>An electromechanical sensor is provided which comprises: a first silicon wafer which defines a resonant element; wherein the resonant element is doped with approximately the same impurity concentration as a background dopant concentration of the first wafer; and a second single crystal wafer which defines a device for coupling mechanical stress from the second wafer to the resonant element; wherein the first and second wafers are fusion bonded together.</p> |
申请公布号 |
EP0400939(A2) |
申请公布日期 |
1990.12.05 |
申请号 |
EP19900305777 |
申请日期 |
1990.05.29 |
申请人 |
SCHLUMBERGER INDUSTRIES, INC. |
发明人 |
BARTH, PHILLIP W.;PETERSEN, KURT E.;MALLON, JOSEPH R. |
分类号 |
G01L1/10;G01L9/00;H01L29/84 |
主分类号 |
G01L1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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