| 摘要 |
<p>PURPOSE:To assure uniform rotation upon rotating a semiconductor substrate by quickly positioning the substrate using element distribution on the substrate. CONSTITUTION:Different high impurity elements or the same elements as those of a semiconductor substrate 1 are previously distributed at two or more positions on the substrate 1 parallel or perpendiculaly to a crystal orientation of the substrate 1. No notch is provided in the semiconductor substrate 1. First, the semiconductor substrate 1 is moved by an X-Y stage until positional relations between the semiconductor substrate 1 and element detectors 2-4 are coincident with the element distribution positions 5, and the semiconductor substrate is quickly rotated by a theta stage 6, and further the element distribution position 5 are detected by the element detectors 2-4. With such operation repeated, the semiconductor substrate 1 is roughly positioned. Hereby, uniform rotation is assured upon rotating the semiconductor substrate 1.</p> |
