| 摘要 |
PURPOSE:To obviate the generation of a film roughening without lowering a residual film rate by consisting the above compsn. of a specific polymer, a compd. contg. a quaternarized salt, an arom. azide compd. and/or arom. sulfonazide compd., and N-allyl glycine compd. CONSTITUTION:This compsn. consists of the polymer essentially consisting of the structural unit expressed by formula I, the compd. contg. the unsatd. bond which can be dimerized or polymerized by chemical rays and an amino group or the quaternarized salt thereof, the arom. azide compd. and/or arom. sulfonazide compd. and the N-allyl glycine compd. In the formula I, R1 denotes a tervalent or quadrivalent org. group having at least>=2 carbon atoms; R2 denotes a bivalent org. group having at least>=2 carbon atoms; R3 denotes hydrogen or the paired ion of an alkaline metal; n denotes 1 or 2. The film thinning and film roughening at the time of a (g) ray stepper exposing are lessened in this way. |
