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发明名称
摘要
申请公布号	JPH0246055(Y2)	申请公布日期	1990.12.05
申请号	JP19840097582U	申请日期	1984.06.27
申请人		发明人
分类号	B65G11/00;B65G43/00;B65G47/24;B65G47/88;G01R31/26;H01L21/66;H01L21/67;H01L21/68;(IPC1-7):H01L21/66	主分类号	B65G11/00
代理机构		代理人
主权项
地址

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