ELECTRODE PLATE FOR PLASMA ETCHING,申请号JP19890115668-传众专利搜索

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发明名称	ELECTRODE PLATE FOR PLASMA ETCHING
摘要
申请公布号	JPH02294030(A)	申请公布日期	1990.12.05
申请号	JP19890115668	申请日期	1989.05.08
申请人	IBIDEN CO LTD	发明人	MINOURA SEIJI;HORIO TAISHIN
分类号	C23F4/00;H01L21/302;H01L21/3065	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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