| 摘要 |
<p>PURPOSE:To simplify production and to stabilize the element by continuously forming the films of the 1st electrode layer and semi-insulating layer on a substrate, patterning the films, and oxidizing the 1st electrode layer to form an oxide film, then providing the 2nd electrode layer on the 1st electrode layer and the oxide film. CONSTITUTION:The films of the 1st electrode layer 2 and the semi-insulating layer 3 are continuously formed on the substrate 1 and are patterned by a photomask. The 1st electrode layer 2 is then oxidized to form the oxide film 4 and thereafter, the film of the 2nd electrode layer 5 is formed on the 1st electrode layer 2 and the oxide film 4 and is patterned by the photomask. The productin is simplified by two sheets of the photomasks and two times of patterning stages in this way and higher advantages are obtd. in terms of the yield and cost of production; in addition, the surface of the 1st electrode layer 2 is completely coated with the oxide film 4 and, therefore, the influence of moisture, etc., is lessened and the element is stabilized.</p> |
