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发明名称
FORMING AN INSULATION LAYER, FOR EXAMPLE IN AN ACTIVE MATRIX DEVICE
摘要
申请公布号
EP0387892(A3)
申请公布日期
1990.12.05
申请号
EP19900104984
申请日期
1990.03.16
申请人
FUJITSU LIMITED
发明人
NASU, YASUHIRO, C/O FUJITSU LIMITED;OKAMOTO, KENJI, C/O FUJITSU LIMITED;WATANABE, JUN-ICHI, C/O FUJITSU LIMITED;ENDO, TETSURO, C/O FUJITSU LIMITED;SOEDA, SHINICHI, C/O FUJITSU LIMITED
分类号
H01L29/78;B82B1/00;G02F1/1362;G02F1/1368;H01L21/28;H01L21/316;H01L21/336;H01L21/77;H01L21/84;H01L29/786;(IPC1-7):H01L21/316;C23C16/40;G02F1/136
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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