| 摘要 |
PURPOSE:To improve the treating efficiency of a wafer conveying device by providing a wafer conveying mechanism of a simple structre using a single power source, thereby facilitating check and maintenance and stabilizing the operation. CONSTITUTION:This device has chains 3, 4 extended in parallel with each other, an electromagnetic clutch 9 interposed between the drive shafts of the chains, a motor 10 connected to the chains, a slide member 12 supported by a guide shaft 11, and a treating tank 2 provided in the chain direction. A rotor 16 is provided at one end of the member 12. Means 17 for converting the rotating motion of the rotor 16 to elevational motions and an arm 18 for holding wafers are provided at the member 12, the arm 18 is elevationally moved by the motion conversion, thereby facilitating the treatment with a simple conveying mechanism. |
