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发明名称
METHOD AND DEVICE FOR FORMING THIN FILM
摘要
申请公布号
JPH02290969(A)
申请公布日期
1990.11.30
申请号
JP19890107719
申请日期
1989.04.28
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
HIRONO SHIGERU;FURUYA AKINORI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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