| 摘要 |
<p>PURPOSE:To prevent a trouble to be caused when an apparatus is operated as it is by a method wherein the apparatus is stopped automatically in an emergency when air tweezers or a wafer held by means of the air tweezers collide with or come into contact with an obstacle. CONSTITUTION:Air tweezers 1 together with a moving base 3 are moved, by means of an actuator, along a direct-acting bearing to the lower part of a wafer which has been housed in an indicated position inside a basket. A wafer suction face is moved slightly in a vertical direction; the rear of the wafer is sucked and held; the wafer is extracted. When the air tweezers 1 or the wafer 7 come into contact with the housing basket, the air tweezers 1 which have been held in a neutral position by means of springs 5a, 5b are moved in an axial direction along the direct-acting bearing 4. When its shifting amount reaches a definite amount or higher and is situated within an inspection distance of proximity sensors 6a, 6b, a detection signal is sent and an operation of an apparatus is stopped.</p> |
