发明名称 |
LAMINATED SEMICONDUCTOR SENSOR WITH VIBRATING ELEMENT AND ASSOCIATED METHOD AND PRODUCT |
摘要 |
LAMINATED SEMICONDUCTOR SENSOR WITH VIBRATING ELEMENT AND ASSOCIATED METHOD AND PRODUCT An electromechanical sensor is provided which comprises: a first silicon wafer which defines a resonant element; wherein the resonant element is doped with approximately the same impurity concentration as a background dopant concentration of the first wafer; and a second single crystal wafer which defines a device for coupling mechanical stress from the second wafer to the resonant element; wherein the first and second wafers are fusion bonded together.
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申请公布号 |
CA2017704(A1) |
申请公布日期 |
1990.11.30 |
申请号 |
CA19902017704 |
申请日期 |
1990.05.29 |
申请人 |
SCHLUMBERGER INDUSTRIES, INC. |
发明人 |
BARTH, PHILLIP W.;PETERSEN, KURT E.;MALLON, JOSEPH R., JR. |
分类号 |
G01L1/10;G01L9/00;H01L29/84;(IPC1-7):H04R21/00 |
主分类号 |
G01L1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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