| 摘要 |
PURPOSE: To form an image of Kikuchi lines of single crystal structure object in the atmosphere by pouring an electron beam to a single crystal structure in the ordinary atmosphere. CONSTITUTION: An object 12 is set in the means 11 of an indexing rotary plate 10. An electronic controller 17 operates a manipulator 13 to take out the object 12 and guides the object 12 to a fixed position in front of a micro beam source F having diameter of 100μm or less. A fluorescent face 9 is guided in front of a luminance amplifier 6 and an X-ray generator 4 is fed with energy. Photons emitted from the generator 4 is diffracted upon striking against the crystal of single crystal structure in the object 12 and a diaphragm image composed of Kikuchi lines is floated on the surface 9. When an operator observes the image on the surface 9 and the orientation of the object 12 is altered by means of a manipulator 13, a new image can be observed. When no defect is detected, the surface 9 is drawn out and an assembly (amplifier 6, video image pickup unit 7) 5 is operated to pick up the diaphragm image which is then processed by means of a computer using an appropriate software.
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