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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02291124(A)
申请公布日期
1990.11.30
申请号
JP19890111666
申请日期
1989.04.28
申请人
FUJITSU LTD
发明人
FUSHIDA ATSUO
分类号
H01L21/768;H01L21/28;H01L21/285
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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