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发明名称
PRODUCTION OF POLYCRYSTALLINE SILICON
摘要
申请公布号
JPH02289495(A)
申请公布日期
1990.11.29
申请号
JP19890109366
申请日期
1989.04.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YAMAZOE HIROSHI;OTA ISAO;KUMAKAWA KATSUHIKO;TSUDA KEISUKE;KIKUCHI ISAKO
分类号
C30B28/12;C23C14/14;C23C16/26;C30B29/06;H01L21/203
主分类号
C30B28/12
代理机构
代理人
主权项
地址
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