| 摘要 |
PURPOSE:To perform accurate positioning of a moving body by mounting a strain gauge on a piezoelectric actuator and controlling the drive of the actuator based on a deviation between the value detected by the strain gauge and a stored corresponding strain value. CONSTITUTION:When this device moves and controls a moving body 12, voltage which is outputted from a strain gauge 13 and is corresponding to the amount of displacement at an installation part 11 is measured and stored at a memory part 3 as data. In the case where the installation part 11 is set to the desired amount of displacement, the amount of displacement of the installation part 11 is set by a setting part 2. Then a control part 4 reads the output value data of the gauge 13 corresponding to the amount of displacement based on the above setting from the memory part 3 and the data are outputted to a drive part 6. Comparing the output value data and the output value of the gauge 13, the drive part 6 performs the operation of a deviation between above data and value and then, controls the impressed voltage of a piezoelectric actuator 7 so that the above deviation can be offsetted. As a result, hysteresis of the actuator 7 is corrected and the installation part 11 is set accurately to a position having the desired amount of displacement. |
