发明名称 MAGNETIC STRUCTURE FOR ELECTRON-BEAM HEATED EVAPORATION SOURCE
摘要 <p>A crucible contains a metal to be evaporated by heating from an electron beam source wherein the path of the electrons is controlled by a horizontal transverse magnetic field over the source and crucible. A number of small individual magnets are arranged horizontally along opposite sides of the crucibles parallel to the beam path. The inner end of each magnet is in the magnetic field area. By varying the positions of the magnets, the field generated may be controlled in a desired manner.</p>
申请公布号 WO1990014682(A1) 申请公布日期 1990.11.29
申请号 US1990002851 申请日期 1990.05.17
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