| 摘要 |
PURPOSE:To align a reticle to a reticle alignment optical system with high accuracy by providing luminous reflection means, which reflect the light having penetrated a reticle alignment mark while sharing an optical axis and turning to the rear of the reticle alignment mark, between the reticle and a projection lens. CONSTITUTION:When the light radiated from a reticle alignment optical system 11 is irradiated on a reticle alignment mark 13, the light having penetrated the reticle alignment mark 13 is reflected by the luminous reflection means between a reticle and a projection lens 3 to irradiate a reticle alignment mark 13 from the rear. That is, the light having penetrated the reticle alignment mark 13 is reflected toward the rear of the reticle alignment mark 13 without passing through the projection lens 3. Accordingly, the reticle alignment mark 13 is simply irradiated only from the rear. Thereby, a single and sharp mark part image is reflected on a display device 30. |
