| 摘要 |
PURPOSE:To enable simple and accurate positioning of a pair of junction electrodes, to improve quality and efficiency of bonding junction, and to exchange a bonding tool readily by forming a specified gap to a surface containing an end side which is a bonding junction section of a tool body to provide a pair of electrode layers. CONSTITUTION:A pair of electrodes 20 for bonding junction consist of a pair of electrode layers 20 which are separatedly formed with a gap 30 of a fixed interval on a tool body 10 which is composed of an insulating material by applying usual thin film formation technique, etc. In this case, an interval between the bonding junction electrodes 20 for bonding junction can be set accurately, thereby producing no step to right and left electrodes. Furthermore, since right and left electrodes are formed integrally to the tool body 10 which is a piece of part, no mechanism or connecting member to connect junction electrodes is required. When a tool is exchanged, exchanging of an entire tool body whereto an electrode layer is formed eliminates the necessity of positioning of all junction electrode. |
