| 摘要 |
PURPOSE:To decrease the damages on a color filter or coat film and to improve characteristics by specifying the heating temp. of a color filter substrate at the time of forming transparent electrode films. CONSTITUTION:The color filter 11 is formed on the glass substrate 10 and a polyimide resin is applied thereon and is cured and polished to flatten the surface and to form the coat film 12. After the surface is cleaned, the transparent electrode films 13 are formed by sputtering. The substrate heating temp. of this time is specified to 150 to 280 deg.C. The nonuniformity of thermal strains by the unequal thickness in the substrate is lessened in this way and the transparent electrode films which are strong to the generation of wrinkles and have the good characteristics are obtd. |
