| 摘要 |
PURPOSE:To contrive the miniturization of a laser discharge tube with the improvement of cooling efficiency for the increase of output, by providing a cooler for gas reservoir and circulating gas in a gas circulation path. CONSTITUTION:A gas supply port 4 and exhaust port 5 to supply and exhaust the mixed gas of carbon dioxide gas and hellium, etc. are formed on the side wall of the laser discharge tube 1 in a laser head A providing a circulating pump 6 for gas circulation and cooler 8 for the gas reservoir 7 to increase gas preservation amount and gas cooling to constitute the gas circulation path 9. In the laser device of such a constitution, supplied gas is circulated by the circulating pump 6 being cooled by the cooler 8 for the decrease of gas temperature to improve efficiency and increase output. Besides, the increase of gas preservation amount can prevent gas from the variation of the composition for contriving output increase and long lifetime. |
