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发明名称
摘要
申请公布号
JPH02140970(U)
申请公布日期
1990.11.26
申请号
JP19890046310U
申请日期
1989.04.21
申请人
发明人
分类号
G01J5/00;C23C16/00;C23C16/52;F27D21/00;G01J5/02;G01J5/06;(IPC1-7):C23C16/00
主分类号
G01J5/00
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代理人
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