发明名称 COATING METHOD FOR FILM
摘要 PURPOSE:To coat the film efficiently and uniformly by synchronously turning a plurality of plate bases. CONSTITUTION:A shaft 12 is rested, a plate setting base 13 is positioned at a chain line and a board to be treated is mounted. The base 13 is turned successively up to a full line section from the lowermost plate mounting base, and a resist agent is dropped onto the surface of the central section of the board to be treated from a dropping port 14. When a main shaft 15 is rotated after the process, the plate supporting base 13 is turned synchronously, and uniform coating is obtained. Small gears 23 and a large gear 22 being in common with the gears are mounted to a plurality of the supporting bases and a shaft 21 is rotated in order to turn a plurality of the plate supporting bases 24. Accordingly, a plurality of the supporting bases 24 are rotated synchronously, and the same effect is obtained.
申请公布号 JPS57204130(A) 申请公布日期 1982.12.14
申请号 JP19810088737 申请日期 1981.06.09
申请人 FUJITSU KK 发明人 KOBAYASHI KENICHI
分类号 B05C11/08;B05D1/40;G03F7/16;H01L21/027;(IPC1-7):01L21/30 主分类号 B05C11/08
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