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发明名称
APPARATUS FOR DETERMINING PARAMETERS OF DEEP CENTRES IN SEMICONDUCTOR STRUCTURES
摘要
申请公布号
SU1608551(A1)
申请公布日期
1990.11.23
申请号
SU19884426234
申请日期
1988.05.16
申请人
RYAZANSKIJ RADIOTEKHNICHESKIJ
发明人
ORESHKIN PAVEL T,SU;LUZAN VIKTOR M,SU
分类号
G01N27/22
主分类号
G01N27/22
代理机构
代理人
主权项
地址
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