摘要 |
<p>An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.</p> |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
HAYASHI, NORIKI, C/O OSAKA WORKS;YOSHIDA, NORIYUKI, C/O OSAKA WORKS |