| 摘要 |
PURPOSE:To improve machining characteristic by making a laser beam among plural laser beams having different wavelengths incident on a condense lens while having hollow state intensity distribution and making the other laser beam incident on the condense lens through the hollow part thereof and converging and irradiating these on the same optical axis. CONSTITUTION:The axis of a first laser beam 1 is arranged on an axis at the incident side of the condense lens 3 and the axis of a second laser beam 2 having different wavelength is arranged in a crossing direction to the axis at the incident side of the condense lens 3. The first laser beam 1 is made incident on the condense lens 3 as the laser beam having the hollow intensity distribution with a conical outer face mirror 4 and a conical inner face mirrors 5. The second laser beam 2 is made incident on the axis of the condense lens 3 from the side part with a bending mirror 6 positioned at the hollow part of the first laser beam. Both laser beams made incident on the condense lens 3, are converged to the same machining spot 8 on a work 7. By this method, the same spot on the work at the same time can be irradiated with the laser beams having different characteristics and the machining speed and the machining depth can be improved. |
