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发明名称
摘要
申请公布号
JPH0254320(B2)
申请公布日期
1990.11.21
申请号
JP19840058881
申请日期
1984.03.26
申请人
SUMITOMO ELECTRIC INDUSTRIES
发明人
MORIOKA MIKIO;SHIMIZU ATSUSHI
分类号
C30B27/02;C30B15/00;C30B29/40;H01L21/208
主分类号
C30B27/02
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