| 摘要 |
<p>PURPOSE:To prevent production of ozone to be unavoidably produced in an electricity eliminating device of this kind using corona discharge by providing an electric field means to position the side of a corona electrode in an air passage, coating the corona electrode of the electric field means with a high purity alumina ceramic layer, and providing a heating means for heating the electric field means. CONSTITUTION:Surface discharge is generated in the surface of a dielectric body 3 between a corona electrode 4 and an induction electrode 5 by a high frequency high voltage source 7 while sending air to an air passage 2, and produced positive and negative ions are supplied to a clean room with flowing air in the air passage 2 for eliminating internal static electrically. Ozone generated in the surface of the dielectric body 3 by corona discharge is heated by a heating body 10 connected with a heat source 9 to be heat decomposed. Because the corona electrode is coated with a layer of high purity alumina ceramic, damage by collision of ions produced by corona discharge is prevented.</p> |
